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Semiconductor field

Source:普爱德环保科技Time:2016-7-28 15:25:51

At present, the air dehumidification there are four main ways, ventilation dehumidification, cooling dehumidification, liquid desiccant dehumidification and solid adsorbent dehumidification. In air conditioning dehumidification system, cooling dehumidification and solid adsorbent dehumidification is the main means. Cooling dehumidification in the environment is not very high humidity requirements (RH ≯ 60 ~ 65%) under the conditions, the effect is quite good, stable performance and low energy consumption, the current application of more extensive. However, where the production environment requires high humidity (RH = 45 ± 5%), the use of cooling dehumidification is obviously uneconomical. The use of wheel dehumidifier, will not be affected by the air, and dehumidifier capacity, especially for low humidity conditions, but if all dehumidification only the principle of solid-state adsorption dehumidifier runner, because of its regenerative energy consumption Relatively large, such programs are not the most economical. As the wheel dehumidification and cooling dehumidification have their own merits, to optimize the combination of their strengths, complementary short, will better play its effectiveness.

Humidity requirements in the semiconductor industry Semiconductor manufacturing plants are required to maintain a stable environment within the production environment throughout the year, especially for production environments such as temperature, humidity, air cleanliness, airflow organization, pressure balance, etc. A number of air-conditioning parameters are put forward strict requirements. Different from other constant temperature and humidity environment system requirements, due to the electrostatic sensitivity of electronic products and high humidity environment on its quality, and its accuracy of the humidity of the strict requirements for the air conditioning system configuration, requires the system At the same time with the function of summer dehumidification and winter humidification function. In general, the temperature and humidity conditions in the semiconductor manufacturing industry are: T = 22 ± 2 ° C, RH = 45 ± 5%; and for this temperature and humidity requirements, traditionally used frozen dehumidification + post-heating (reheat) , And achieved some results. But this way there is a fatal problem, the hot and cold offset and a huge waste of energy consumption, especially because of the semiconductor industry Dah Sing wind, large exhaust system, the production environment for the large space clean environment and the current concentration of many plants mainly concentrated In southern China and East China's special circumstances, making this problem is very prominent. Therefore, the air conditioning system in many of the latest semiconductor plant began to use fresh air through the new air unit (cooling dehumidification) and the rotor dehumidifier combined treatment of humidity, temperature and then through the rear air conditioning unit to deal with combinations of indoor air temperature and humidity requirements, And achieved significant gains.

Characteristics of combined desiccant air conditioning system with runner and cooling

Combining the cooling and dehumidifying circulatory system with the cooling and heat exchange with the dehumidification of the runner, the desiccant dehumidifier is used to carry on the deep dehumidification by the dehumidifier. Cooling dehumidification within a certain range of good dehumidification, and stable performance, but when the humidity requirements are low, cooling dehumidification capacity decreased significantly, then use the wheel and cooling combined dehumidification system, can achieve good results. Cooling dehumidification as a pre-dehumidification, highlighting the cooling dehumidifier high-energy conditions, low energy consumption characteristics, the use of wheel dehumidification dehumidification depth, highlight the wheel dehumidifier low temperature and low humidity conditions, Limit and the advantages of large dehumidification capacity. This system commonly used treatment process is as follows: 1: cooling dehumidification; 2: wheel dehumidification; 3: so wet cooling; 5: regeneration heating; 6: adiabatic regeneration

In the low-humidity environment, the use of runner and cooling combined dehumidification air conditioning system has only cooling dehumidifier incomparable superiority.


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